High Vacuum Mass Flow Meter

High Vacuum Mass Flow Meter

Introduction The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC...
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Product Details


Specification



Ranges of Flow

(20,30,50,100,200,300,500) SCCM

(0~1,2,3,5,10) SLM

Accuracy

±1.5%F.S

Linearity

±1%F.S

Repeatability

±0.2%F.S

Response-Time

≤4 sec

Temperature Coefficient

Zero: ≤±0.1%F.S./℃;Span: ≤±0.2%F.S./℃

Max Pressure

3MPa

Operation Temperature

5℃~45℃

Sealing Material

Viton, Neoprene

Setting/Output Signal

0V~+5.00V

(Input Impedance >100K,Output Current≤3ma)

Power Supply

+15V   50mA

-15V   50mA

Electrical Connection

D sub 15 pins Female

Differential Pressure

0.01 MPa

Leak Rate

1×10-8atm•cc / sec He(1×10-9 Pa•m3 / sec He)

Standard Joint

SwagelokΦ8, SwagelokΦ6, SwagelokΦ3, Swagelok1/8”,φ4(Inner)×1 Hose Coupler, VCR1/4”, Swagelok1/4”, φ6(Inner)×1 Hose Coupler

Media

All Gas

Emi

CE

Weight

0.92kg



Introduction


The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting, vacuum system researching, etc.



Features


High precision, long service life, excellent repeatability

◆ Quick response, soft-start, good reliability

◆ Wide operation pressure range (good operation in high pressure or vacuum situation)

◆ Easy and convenient operation

◆ It can be installed wherever needed and connected with the computer to realize automatic control.

 


Typical Application


The typical applications of MFC include microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma, etching, sputtering, ion implantation and other field such as vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.



 Installation Dimension


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Packing: 1. Wooden box

                  2. Carton

                  3. As your request


Payment: T/T, L/C, etc.


Delivery time: Normally 10~15 days after payment


Shipping: By air or by sea


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