Chamber Size | φ1900*H1300 | Effective Space | φ1600*H1000 |
Ultimate pressure | 5.0*10-4Pa | Leak Rate | <10-3Pa.L/s |
Standard Coatings | IP-black, rose gold, IP-gold, sapphire blue, champagne gold, silver, brown, colorful, gun black, zirconium, rose red, etc. | Standard Configuration | 10 Cathode Arcs/ 12 MF Cylindrical Targets |
Voltage/Hz | 380V/50Hz | Actual Power | 120KW |
Technology | MF+ARC (Optional) | Target Qty | 12 Cylindrical Targets /10 Arc Targets |
Power Supply | MF Magnetron Sputtering Power Supply; DC Pulse-bias Power Supply; Special Vacuum Arc Power Supply | Vacuum System | Molecular Pump Roots pump Rotary Vane Pump |
Coating Cycle | 1.5-3.5 hours/furnace | Occupation Space | L3600*W3200*H2600mm |
Application：
